NTC热敏薄膜的研究进展

Research progress of the thin films for NTC thermistor

综述了负温度系数(NTC)热敏薄膜目前最常用的四种制备工艺,即:蒸发法(evaporation),磁控溅射法(magnetron sputtering),脉冲激光沉积法(PLD)和金属有机物热分解法(MOD),分析了这几种工艺的优缺点及国外的研究进展。并简要介绍了NTC热敏薄膜在传感器等方面的应用和发展前景。

Reviewed was the progress of the research on the NTC thermistor thin films, and its four most commonly used preparation methods, such as evaporation, magnetron sputtering, PLD and MOD. Next, its application and development prospect in sensor area were presented.