单色器水冷晶体面形误差的研究

Slope errors of water cooling crystal surface for a double-crystal monochromator

针对第三代同步辐射装置光束线中的双晶单色器,分析了引起直接水冷却晶体面变形的原因,提出直接水冷却异型晶体结构,并用有限元方法进行数值模拟分析,得到晶体面形误差,并提出优化面形精度的方法。结果表明,在热负载、装夹力、真空负压和水流压力下,水冷却异型晶体在热源辐照区弧矢向和子午向平均面形误差RMS值分别达到1″和0.6″。

For the third synchrotron radiation facility, four reasons resulting in diffraction crystal distortion of double-crystal monochromator, and deficiency of traditional water cooling crystal are analyzed, and irregular structure of water cooling crystal is proposed. Slope error of crystal have achieved by numerical simulation analysis of finite element method. The result indicates that slope error of crystal surface in sagital and meridian is 1″and 0.6″.