GCr15长方形工件的纳米级表面超精密研磨技术研究

Research of Nanometer Level Ultra-precision Lapping of GCr15 Rectangular Workpiece

针对材质为GCr15轴承钢的长方形工件纳米级超光滑表面的技术要求,在CJY500超精密研磨机上,采用机械研磨和化学抛光相结合的非接触式超精密研磨(浮动研抛)方法,对长方形GCr15轴承钢工件进行超精密研磨抛光。结果表明:与其它研磨方法相比,此方法在获得纳米级表面粗糙度的同时,还能获得极高的面形精度,而且无加工变质层。

To meet the process requirements of ultra-smooth surface of the rectangular workpiece made of GCr15 bearmg steel,an non-contact ultra-precision lapping method based on mechanical lapping and chemical polishing is adopted to lap and polish rectangular workpiece by the CJY500 ultra-precision lapping machine. The result shows that the method can obtain excellent quality of lapping surface. Comparing with other method,nanometer level surface roughness,wonderful quality of surface accuracy and a surface without lapping surface degenerating layer are obtained.