摘要
概述了微机电系统的结构和特点,介绍了微机电系统的研究和应用领域。
In this paper, the structure and features of MEMS were summarized, and the field of research and applications of micro-electro-mechanical systems were introduced.
出处
《装备制造技术》
2008年第7期105-106,共2页
Equipment Manufacturing Technology
基金
湖北省教育厅教学研究项目20060426
