提高CCD分辨率的一种尝试

A New Way to Improve the Resolution of CCD

微／纳米技术是当前科研领域的一大热点，作为微／纳米技术的一个重要分支——微／纳米级测量技术自然也受到了广泛的重视。本论文的研究目的在于探索运用ＣＣＤ器件进行微／纳米量级测量的一种新方法。ＣＣＤ的测量分辨率受到其像元间距的限制，为欲突破这种限制，我们在运用数字图像处理技术的基础上，探讨了一种新的图像处理方法。

At present, more and more attentions are given to the micrometer/nanometer technologies. In this paper, a new method for micrometer/nanometer measurements by using CCD is presented. The measurement resolution of CCD is limited by its basic component size. In order to solve this problem, we have proposed a new method based on digital image processing techniques, and done some theoretical and experimental works.