激光光强分布测量中面阵 CCD 信号畸变的校正

Correction of Distorted CCD Signals in Measurement of Laser Beam Intensity Distribution

当面阵ＣＣＤ用于激光能量空间分布测量时，由于ＣＣＤ探测器光电响应非线性、光电响应非均匀性等因素影响，必然使信号产生畸变。本文通过理论分析与实验对畸变进行了校正，收到了良好的效果。

Being affected by several factors, such as non uniformity and nonlinearity of the photoelectric responses in CCD sensor array, the CCD signals are distorted when area arrays of CCD are used for measurement of laser beam intensity distribution. This paper discusses the correction of distortion by theoretical analyses and experimental investigations. Experimeental results are very satisfactory.