CVD金刚石膜超精密度刀具技术研究

Study on the ultra-precision cutting tools with CVD diamond film

文章对CVD金刚石的物理特性进行了描述,研究了CVD金刚石膜制作超精密刀具的工艺技术方法,设计了生产工艺流程,对生产的CVD金刚石膜直刃和圆弧超精密刀具的精度及加工件的精度进行了测试,表明CVD金刚石膜是一种非常优异的超精密刀具的制作材料,应用前景非常广阔。

In the paper, the authors describe the physical characteristics of CVD diamond, research the method of CVD diamond films making ultra-precision cutting tools and design the production craftwork flow. Through testing accuracy of the straight and arc ultra-precision cutting tools and workpieces, the results show that CVD diamond films are excellent materials used in making the ultra-precision cutting tools and have bright development prospect.