纤维基ZnO/Ag/ZnO多层膜表面形貌的AFM观察

AFM observation on the surface morphology of ZnO/Ag/ZnO multilayer films deposited on fiber substrates

在室温状态下,采用磁控溅射法在PET纤维上制备了Ag膜、ZnO膜和ZnO/Ag/ZnO多层膜,运用原子力显微镜(AFM)对纳米结构薄膜的表面形貌进行观察,并对导电特性进行测试。结果表明,随着Ag膜厚度从10 nm增加到20 nm,Ag膜的致密性和均匀性变好;在纤维表面和ZnO膜表面生长相同厚度的Ag膜,其表面形貌不同,在ZnO薄膜表面生长的Ag膜比在纤维表面生长的Ag膜均匀性好,Ag颗粒更大,颗粒的匀整性也更好;同样,在纤维表面和Ag膜表面生长相同厚度的ZnO膜,其表面形貌也不同。多层膜的电阻随着Ag膜厚度的增加而减小;当Ag膜为20 nm时,电阻达到最小。

The Ag films, ZnO films and ZnO/Ag/ZnO multilayer films deposited on PET fiber substrates were prepared by magnetron sputtering at room temperature. The surface morphology of the nano-structured films was observed by using atomic force microscopy （AFM）. Its electroconductive property was measured and analyzed. Results showed that the density and uniformity of Ag film became better as the thickness of the film increased to 20 nm from 10 nm. The surface morphology of fiber substrate was different from that of ZnO film substrate when they had same thickness growth of Ag film on their surfaces. The uniformity of Ag film deposited ZnO film substrate was better than that of Ag film deposited fiber substrate, and the particle of Ag film of the former was bigger, and more uniform. Also, the surface morphology of fiber substrate was different from that of Ag film substrate when they had same thickness growth of ZnO film on their surfaces. The resistivity of muhilayer films was decreased as the thickness of the Ag film was increased. The resistivity of muhilayer films reached to the minimum value when the thickness of Ag film was 20 nm.