洁净搬运机器人及其手臂的运动分析与仿真

A Kind of Clean Room Conveying Robot and its Arm's Kinematics Analysis and Simulation

随着高性能IC制造装备的需求,提出了一种由升降旋转部件、径向直线伸缩部件、末端执行机构等部分组成的洁净搬运机器人。介绍了这种洁净搬运机器人的机械结构和技术特点,着重分析了其主要部件的运动机理。针对洁净搬运机器人手臂的转动惯量对系统动态性能的影响,利用Lagrange函数得到了计算转动惯量和转矩的公式,并利用Cosmosmotion对运动结果进行了分析与仿真,为动态性能的研究提供了重要的理论基础。

With the requirement of Integrated Circuit（IC） manufacturing equipment, a kind of clean room conveying robot consisting of revolution mechanism, radial rectilinear stretching mechanism, and end effector, is presented in this paper.M echanical structure and characteristic technology are introduced. The movement theory of its department is emphatically analyzed. Aiming at the influence of the inertia of the robot arm, it obtains the inertia and torsion formula based on Lagrange function, and the movement result is analyzed and simulated by Cosmosmotion, which offers the theory basis for dynamic character.