大直径单晶体生长控制系统研制

Control System of Ball screw on Growing Crystal Stove

本文研制开发了一种大直径单晶体生长控制系统,主要部件采用稀土永磁直流力矩测速机组,滚珠丝杠,嵌入式单片机、交流伺服电机等。提出了一种用单片机和D/A转换器实现交流伺服电机多波形控制的优化算法,提高了控制精度,简化了编程方案。试验证明它性能可靠,工作稳定,是较完美的大直径单晶体生长控制系统。现已正式投入使用。

This paper has opened the control system of the single crystal growth. Main components of the system are the DC motor, ball screw, embedded MCU （Micro Controller Unit）, AC servomotor and so on. It gives out a optimized arithmetic of multi-wave control system with DAC and MCU. It has increased control precision, and simplified the programmable method. Test had proved it＇s properties to be stable and it＇s operations to be dependable.