摘要
大角度扭转微镜是一种静电驱动的MEMS微致动器。微镜的大角度扭转会引起极板间电场分布的显著变化,使得极外电场的对微镜的影响变得不容忽略。此外,微镜受静电力作用时,悬臂梁会产生扭转和弯曲两种变形,悬臂梁的弯-扭耦合效应的影响也是必须考虑的。综合考虑了这两类影响,推导出了适用于分析大角度扭转微镜静态特性的解析公式。
The electric field is redistributed with the large angel torsion of elctrostatic actuated micromirror and the out of plane electric field can not be neglected.In addition,the cantilever beam will be torsional and bending deformed simultaneously under electrostatic force,and the coupling effect of torsion and bending should be considered.The static modelling of the large angular deformation of torsional micromirror has been presented involving the above two effects,and the results are compared with that from other literatures.
出处
《科学技术与工程》
2008年第16期4675-4679,共5页
Science Technology and Engineering
关键词
大角度扭转微镜
静态特性
耦合
large angular deformation torsional micromirror static analysis electrostatic field coupling
