基于时间差法的共焦测头算法改进

Improved arithmetic of confocal probe based on time difference measurement

近年来,三坐标测量机正在迅速发展。测头作为三坐标测量机的基本部件之一,与测量机的功能、工作效率、精度密切相关。光学非接触测头具有测量精度高,没有测量力,没有摩擦,测量速度与采样频率高等特点,是目前研究比较活跃的领域。本文中所讲到的共焦测头就是光学非接触测头的一种。本文在研究了共焦法测量传感器及其测量系统的基础上,提出了一种通过测量连续两个峰值信号的时间差来计算被测表面位置的方法。这种测头舍弃了参考信号,简化了系统结构,降低了成本,实用性更强。

Coordinate measuring machine has been developed very fast. Probe,as one of the basic components of CMM, is closely related to the function, efficiency and precision of CMM. Optical non-contact probe with high accuracy, no measuring force,no friction, high measuring speed and high sampling frequency, is now an active research field. The confocal probe mentioned in this paper is one of that optical non-contact probes. On the basis of research on confocal measurement sensor and its measuring system, a method of calculating position of measured surface through use of time difference measurement between two successive peak signals is presented. Reference signal is given up in the probe, so system construction is simplified and cost is decreased.