同位素薄膜厚度在线测量系统

On-line Measuring System Using Isotope to Gauge Film Thickness

针对宽幅薄膜厚度实时测量的难点,设计了同位素薄膜厚度在线系统;提出了两点法来确定系统工作曲线,两点法减少了确定工作曲线的试验工作量,提高了工作曲线适应不同测量条件的能力;在分析了测量中出现的各种误差的基础上,讨论了针对各种误差的校正方法,采用了脉冲定时计数的方法测量信号频率,有效地提高了测量精度,具有广泛的应用价值;该系统在测量薄膜厚度时取得了良好的测量结果,并已经有产品进入市场。

On--line system was developed to gauge film thickness using isotope, by which the problem of difficulty in measuring wide film thickness was resolved. Two--point method, determining working curve of gauging system, was introduced, by which time spent on ex- periment could be decreased, and adaptability of working curve under different condition was improved. After analyzing measuring errors, emendation method for every error source was discussed. Method taking count of pulse number within a period of time was applied, by which measuring precision was improved, so this method can be used widely in other applications. This measuring system has obtained satisfying effect in measuring film thickness, and products can be bought in market.