真空紫外-软X射线波段(5～105nm)探测器校准装置的研制

Detector Calibration Facility in the Wavelength Range of VUV-Soft X-Ray(5～105 nm)

介绍了中国计量科学研究院在真空紫外-软X射线波段（5～105 nm）探测器标准研究的新进展。介绍了建立在中国科学技术大学国家同步辐射实验室的以稀有气体电离室为标准探测器的探测器校准装置,以及利用该电离室作为基准探测器对作为传递标准探测器的硅光电二极管的量子效率测量的结果,在5～35 nm范围内,相对标准不确定度为18%～20%。与NIST的结果相比,有较好的符合。

The development of standard detector in the wavelength range of 5 - 105 nm by the National Institute of Metrology （NIM） is introduced. A description is given of a detector calibration facility, located at the National Synchrotron Radiation Laboratory （ NSRL）, in which a rare gas ionization chamber is as the primary standard detector. The efficiency of the photodiode as the transfer standard detector was calibrated with the rare gas ionization chamber which as the primary standard detector in the wavelength range of 5 - 35 nm. The calibration results with 18% - 20% uncertainty are consistent with that of the National Institute of Standards and Technology （NIST）.