摘要
采用离子束辅助沉积技术,在硅、钼衬底上分别制备铂碳混合膜。XRD的分析结果表明,当铂碳混合膜中铂的组份较多时,有较强的铂(111)面衍射峰和较弱的铂(200)面衍射峰,铂的组份呈(111)择优取向。Raman谱的分析结果表明,碳基本上呈非晶状态。模拟二极管的实验表明,在纯钼阳极上镀覆铂碳混合膜,其抑制热电子发射的性能明显优于纯钼阳极。
Platinum （Pt） and Carbon （C） was coated on the substrate of silicon and molybdenum by ion beam assisted deposition （IBAD）. The structure of the as - deposited Pt - C film was studied by XRD and Raman spectroscopy. The XRD results show that Pt exhibits mixed strong （ 111 ） and weak （200） orientations. The Raman spectrum show that the carbon exists in the form of amorphous. The electron emission suppression characteristics of Pt - C thin film were measured using analogous diode method. The results show that electron - emission from Mo anode coated with Pt - C film is much less than that from the Mo anode without Pt- C film.
出处
《功能材料与器件学报》
CAS
CSCD
北大核心
2008年第4期757-762,共6页
Journal of Functional Materials and Devices
基金
国家自然科学基金资助项目(No.10505027)
