摘要
介绍了声表面波气体传感器的基本工作原理和设计方法,通过SAW芯片拓扑结构、敏感膜、覆膜工艺和信号处理电路等方面的优化,研制出两种SAW化学战剂气体传感器,具有灵敏度高、响应和解吸附快,抗干扰能力强的特点。
The fundamental theory and design method of surface acoustic wave（SAW） toxic gas sensor were introduced in this paper. Two kinds of SAW gas sensor were fabricated by optimizing SAW chip topology, sensitive polymer, coating technics and the signal processing circuit with high sensitivity, short adsorption/restoration time and good high anti-disturbance ability.
出处
《压电与声光》
CSCD
北大核心
2008年第5期525-527,共3页
Piezoelectrics & Acoustooptics
关键词
声表面波
化学战剂
传感器
surface acoustic wave （SAW）
chemical warfare agent
sensor
