基于压电致动的微流体主动控制阀的研究

Study on an Active Controlled Microfluidic Valve Utilizing the Unimorph Circular Piezoelectric Actuator

介绍了一种采用圆盘形压电振子作为致动元件的微流体主动控制阀。通过圆盘形压电振子的变形改变其与圆环面边界间的过流间隙以实现微流体主动控制阀的开启、关闭及其程度,并建立了微流体主动控制阀的流量控制模型。在此基础上,对作用于圆盘形压电振子上的控制电压和进出口压差对微流体主动控制阀流量的控制特性进行了仿真与分析。研究结果表明,通过改变作用于压电振子上的控制电压可实现阀流量的连续控制,通过改变微流体主动控制阀的进出口压差也可在一定程度上控制阀流量。

An active controlled microfluidic valve utilizing the unimorph circular piezoelectric actuator, in which the on and off states are realized through changing the fluid flow gap between the unimorph circular piezoelectric ac- tuator and the annular boundary by the deformation of the unimorph circular piezoelectric actuator, is presented and the fluid flow control model is established. On this basis, the fluid flow control characteristics of the control voltage on the unimorph circular piezoelectric actuator and the pressure difference between the inlet and outlet of the active controlled microfluidic valve are simulated and analyzed. The research results indicate that the fluid flow of the valve can be continuously controlled through the control voltage applied on the unimorph circular piezoelectric actuator. In addition, the fluid flow of the valve can also be controlled through changing the pressure difference between the inlet and outlet to some extent.