溶胶-凝胶法在平面光波导薄膜制备中的应用

Application of Sol-Gel Technique to the Preparation of the Planar Waveguide

溶胶-凝胶技术作为一种湿化学法具有工艺温度低、化学均匀性好、易实现材料的掺杂等独特的优点,平面光波导薄膜是制备其他各种波导和集成光学器件的基础。近年来,采用溶胶-凝胶技术制备平面光波导薄膜已成为研究热点。该文综述了溶胶-凝胶法在制备平面光波导薄膜中的应用及其发展趋势。

Sol-Gel technique has many special advantages as a wet chemical process, such as lower heat treat- ment temperature, unlformer composition and easier doping operation etc. In addition, planar waveguides are the basis of the preparation of the IO devices. In recent years, the synthesis of waveguide films from Sol-Gel technique has been brought into focus. This paper summarized the applications of Sol-Gel technique to the preparation of the planar wavegulde film and its trend of development.