摘要
针对微纳制造中光刻掩模板检查对线宽、线间距等几何量测量的技术需求,开发了一个基于计算机显微视觉的微小结构几何量的测量系统。该系统采用光学分辨率为606nm的光学成像设备,采用LabVIEW的Vision工具编写的图像测量软件具有多方向轮廓点自动拾取模块、宏微测量策略、自动对焦功能等关键功能。实验与分析结果表明该系统可以实现对微米/亚微米结构的测量。
Objecting to technique requirement of measurement for geometric elements such as line width and distances between lines in masks used in micro/nano manufacturing, a computer vision based measurement system for geometric measurement of micro structure was developed. This system, which embeds 606nm optical revolution and is programmed in I.abVIEW and its Vision toolbox, has some key functions such as multi-directions profile searching, macro/micro measurement methods and auto focusing. The experimental and analysis result shows that this system can satisfy the measurement of micrometer/nanometer geometric elements.
出处
《机床与液压》
北大核心
2008年第8期212-215,共4页
Machine Tool & Hydraulics
基金
广东省自然科学基金博士启动项目(B01B6050540)
关键词
计算机显微视觉
图像测量
几何量测量
Computer micro vision
Image-based measurement
Geometric measurement
