电容式微加速度传感器偏置电压的设计与分析

Design and Analysis of Bias Voltage on Variable-capacitance Micromechanical Acceleration Sensor

电容式微加速度传感器中偏置电压产生的静电力会干扰加速度传感器的测量和稳定工作条件。文中分析受到加速度信号作用时,不同偏置电压极性对电容加速度传感器稳定工作条件的影响,得到一系列变化曲线。结果表明:若偏置电压极性为正正或正负配置,其反馈是负反馈,且偏置电压极性为正负配置时,加速度传感器承受加速度冲击的能力最强。若偏置电压极性为负负或负正配置,其反馈是正反馈,偏置电压极性为负正配置时,其抗加速度冲击的能力最弱。

The electrostatic forces caused by bias voltage may significantly interfere to the measurement and the reliable operation of the devices on capacitive acceleration sensor. The effects of electric testing signal with different bias voltage polarities on the reliable operation condition were quantitatively analyzed when an acceleration signal was applied on the capacitive acceleration sen- sor. A serial of alternative curves were given. The results show that the feedback is negative for the positive-positive one and posi- tive-negative bias voltage configurations, and the reliable operation ranges for positive-positive bias voltage configurations is smaller than for positive-negative. The feedback is positive for negative-negative and negative-positive bias voltage configurations, and the reliable operation ranges for negative-positive bias voltage configurations is the smallest of all the bias voltage configurations.