基于虚拟仪器的压电微位移驱动器线性化研究

Research on Linearization of Piezoelectric Actuator Based on Virtual Instrument

根据压电陶瓷的非线性特性，提出了一种采用离散电压标定和控制压电微位移驱动器线性化的方法。利用数模输出卡，输出不同步长的单个的离散电压，控制压电陶瓷伸长的速度，从而达到利用选取的电压值参数来控制压电陶瓷伸长速度的目的。选取恰当的电压值，可以使得压电驱动器在时间域上线性地伸长而达到线性化。设计基于Labview的控制系统，并对线性化方法进行了原理分析和实验。实验结果表明，该系统可以有效地在0—300V范围内使压电微位移驱动器的伸长量与时间成线性关系，定位精度为1nm。

According to the piezoelectric actuator＇ s nonlinear characteristic, a method of piezoelectric actuator＇ s linearization based on discrete point of voltage is presented. By using the digital-to-analog（DA） output card,output single voltage which in different interval. In this way, the speed of piezoelectric ceramic＇ s elongation can be controlled by the output voltages. It can be elongated linearly in the time field with the special voltages adopted before. In order to test the method, an experimental control system and program is designed. The experiment shows that the system is effective to linearize the piezoelectric ceramic in the range of 0 - 300 V, and the superiority including low cost with universal component and high positioning accuracy with 1 nm.