金刚石上磁控溅射镀 Ti 研究

Study of Ti Coating on Diamonds by Magnetron Sputtering

本文报道了金刚石上磁控溅射沉积Ｔｉ涂层技术，测定了金刚石镀前、镀后的抗压强度值，用电子显微镜（ＳＥＭ）对金刚石表面镀覆前后的表面进行了观察，并对其在络合剂中的结合情况进行了研究。结果表明：Ｔｉ涂层均匀、致密，改善了与络合剂的浸润性，提高了金刚石工具的性能。

This paper deals with Ti coating on diamond by magnetron sputtering technique, uncoated and coated diamond surface morphology are examined by SEM, SEM observation on section of Ti claded and not claded diamonds copper samples. Test results show that Ti coating is uniform and non porous,and it enable compressive resistance of the diamond to increase. Affinity of diamond for copper samples is improved, consequently grinding property of diamond is greatly improved.