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八臂梁硅微加速度计横向灵敏度仿真分析

Simulation and Analysis of Cross Sensitivity of Eight-cantilever Silicon Micro Accelerometer
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摘要 应用ANSYS软件对MEMS器件——八悬臂梁硅微加速度计的横向灵敏度进行了仿真。仿真时分别在此器件的X轴、Y轴、Z轴单独加一个加速度,分析另外两个轴的输出,便可以得出其横向灵敏度。依据仿真结果,可先求出各个输出轴对应的梁的应力,即可算出其电阻的变化量,从而计算出输出轴的输出电压。 The MEMS's part-cross sensitivity of eight-cantilever silicon micro accelerometers was simulated by ANSYS software. In the simulation, the acceleration was added on each axis respectively, the output of two different axles was analyzed and the cross sensitivity can be obtained. According to the simulation, the resistance change can be calculated out, if the stress of the beam of each output axis correspondence is calculated in the simulation, thus an output voltage of output axis can be figured out.
出处 《弹箭与制导学报》 CSCD 北大核心 2008年第4期295-297,共3页 Journal of Projectiles,Rockets,Missiles and Guidance
基金 山西省留学回国人员基金资助
关键词 MEMS 硅微加速度计 加速度 仿真 MEMS silicon micro accelerometer acceleration simulation
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