摘要
低电压扫描电子显微术是研究半导体、绝缘体和生物材料的有效方法。本文综述了这种方法的优点、限制和关于扫描电镜的改进,并且提供了实际操作的某些要领。
Low voltage scanning electron microscopy (LVSEM) is an effective method for the study onsemiconductors, insulators and biological materials. This article reviews the adventages and limi-tations of this method, and the improvements in scanning electron microscope. Some guides forpractical operation are proposed.
关键词
扫描电镜
电子显微术
低电压
扫描
low voltage scanning electron microscopy
charging up
radiation damage
spacecharge effcts
stray fields
