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CO_2连续激光弯曲硼硅酸盐玻璃薄片的实验研究 被引量:4

Borosilicate glass film bending by CO_2 CW-laser
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摘要 利用CO2连续激光对硼硅酸盐玻璃薄片进行了弯曲实验,确定了用CO2连续激光弯曲厚度150μm的玻璃所需功率密度阈值。研究了激光功率、扫描速度、扫描次数及样品宽度对弯曲效果的影响,并简要分析了弯曲现象产生的原因。给出了弯曲加工时激光功率和扫描速度的范围,获得多组可以成功弯曲玻璃样品的工艺参数。实验结果表明,采用CO2连续激光可以对硼硅酸盐玻璃薄片进行弯曲加工,弯曲角度可达24°以上。 An experiment of borosilicate glass film bending by CO2 CW-laser was presented,and the laser power density threshold was determined for glass specimen with thickness of 150 μm. The effects of process parameters (laser power, scanning velocity, number of scannings) and work piece geometry (specimen width) on the bending angle were investigated, then the experimental phenomenon was analyzed. The extent scopes of the laser power and scanning velocity were generalized for the bending progress,meanwhile,several groups of processing parameters were obtained. The experimental result indicates that the borosilicate glass film could be bent to an angle up to 24^o using CO2 CW-laser.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2008年第8期1416-1422,共7页 Optics and Precision Engineering
基金 辽宁省自然科学基金资助项目(No.20062178) 高等学校博士学科点专项科研基金(No.20070141002)
关键词 激光弯曲 硼硅酸盐玻璃 热应力 弯曲角 laser bending borosilicate glass thermal stress bending angle
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