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共轴TMA反射镜面形不规则对波前误差的影响 被引量:5

influence of surface irregularity of on-axis TMA mirror on wave-front error
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摘要 以某遮拦比为22.3%的共轴三反系统的Φ600 mm主镜为例,分析了主镜、次镜和三镜面形不规则对高斯焦点波前差的影响,并拟合了数学表达式。使用环域修正Zernike多项式作为光机接口,分析了环境对反射镜面形的影响以及传递函数下降的情况,并将分析结果作为参考对主镜支撑进行了改进。根据像差容限和系统的环境耐受力,分解出主镜加工所需的精度应优于λ/36.5。 By taking an actual on-axis Three Mirror Anastigmatic(TMA) system with a Ф600 mm primary mirror for example, the influences of the surface irregularities of primary mirror, secondary mirror and tertiary mirror on Gaussian focus wave-front error were analyzed, and the mathematic expressions of the influences were fitted. Circle field fixed Zernike polynomial was used as an optic-mechanic interface to analyze the environment influence on primary mirror and system performance degeneration. Finally,by taking the result as reference, the supporting structure of primary mirror was im- proved. Based on the Marechal criterion and environment endurance, the manufacturing accuracy of primary mirror is deduced, which shows that it should be higher than A/36.5.
出处 《光学精密工程》 EI CAS CSCD 北大核心 2008年第8期1516-1521,共6页 Optics and Precision Engineering
基金 国家863高技术研究发展计划资助项目(No.2007AA12Z113)
关键词 共轴三反系统 ZERNIKE多项式 面形不规则 波前差 on-axis Three Mirror Anastigmatic(TMA) system Zernike polynomial surface accuracy wave-front error
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