摘要
利用直流磁控溅射法在有机薄膜衬底和普通玻璃衬底上制备出了具有良好附着性的ZnO:Al薄膜,并分析了氧分压、溅射压强、沉积时间、温度对薄膜结构特性的影响。研究发现,铝掺杂的氧化锌薄膜是多晶膜,具有六角纤锌矿结构,ZnO:Al薄膜具有(002)择优取向。在同样的制备条件下,薄膜的晶化在普通玻璃上比在PET衬底上要好,但是在特定的条件下(沉积时间15 min),在PET衬底上的要比普通玻璃衬底上的好。
ZnO：Al films have been deposited on Polyethylene terephathalate （PET） and glass substrates by DC magnetron sputtering technique. The structure properties of deposited films were investigated. The samples are polycrystalline with a hexagonal wurtzite structure and have a strong crystallographic c-axis orientation （002） perpendicular to the substrate surface. The results showed that in the same condition, the crystalline volume fraction on glass substrate is better than that on the PET, but in the special case, the result is opposite.
出处
《可再生能源》
CAS
2008年第4期64-68,72,共6页
Renewable Energy Resources
关键词
有机衬底
ZNO:AL
晶化
flexible substrate
ZnO：Al films
crystalline volume fraction
