步进扫描式光刻机隔振试验平台主动减振系统试验研究

Experimental Research on an Active Vibration Control System of the Step and Scan Lithography Vibration Isolation Platform

根据步进扫描式光刻机的振动特点,设计隔振试验平台的减振系统,并对试验平台的主动减振系统进行测试研究。测试结果表明,步进扫描式光刻机隔振试验主动减振系统,能有效降低光刻机工作过程中运动部件对工作平台的冲击,具有良好的减振效果。

According to the vibration characteristic of the step and scan lithography, the vibration reduction system of the vibration isolation platform is designed, and the experimental research on its active vibration control is conclucted. The testing result indicates that the active vibration control system of the step and scan lithography vibration isolation platform can reduce the vibration of the lithography caused by the moving parts effectively and the damping effect is satisfactory.