不同组分对PI／Al2O3复合薄膜的击穿性能和微观形貌的影响

Breakdown Characteristics of PI/Al_2O_3 Hybrid Film with Different Content and Morphology Analysis of Breakdown Holes

为研究纳米填加剂(Al2O3)对PI复合薄膜击穿性能和微观形貌的影响,对0、5%、10%和20%4种不同质量分数的纳米Al2O3的PI/Al2O3复合薄膜击穿特性进行了测试,并借助扫描电镜对PI/Al2O3复合薄膜击穿孔区形貌进行特征分析,进一步利用积分法计算得到了击穿孔区的有效面积。结果表明:掺杂5%含量的Al2O3的PI复合薄膜击穿场强达到最佳。得出不同组分Al2O3的PI复合薄膜击穿孔有效面积的大小关系是:S20%<S5%<S10%<S0。可见,引入纳米Al2O3颗粒可以使复合薄膜击穿孔的有效面积减小,说明掺杂纳米Al2O3对复合薄膜的击穿孔的有效面积大小是有显著影响的。

The breakdown characteristics and micro-morphology of PI/Al2O3 hybrid film with different content of Al2O3 were studied. The morphology around the breakdown holes was examined by means of ascanning electron microscope（SEM）. The area of the breakdown holes was calculated by the integration method. The result shows that the breakdown strength of the films with 5% content of Al2O3 is higher, and the relation between the effective area of the breakdown holes is： S20%〈 S5%〈S10%〈S0. It indicates that the effective area of the breakdown holes in the hybrid films with nano-particles added can be obviously reduced.