摘要
针对锥光全息式非接触测量的高度信息恢复问题,对光强-高度标定方法的不足进行了分析,提出了一种基于相对变化量的相位-高度标定方法,即在理论和实验结合下,确定相位和被测距离的相对变化量的数学关系,并采用具有全局优化能力的遗传算法对确定的关系式中的各个参数进行优化。实验结果表明,该方法大大降低了光源波动对图像处理的影响,同时,简化了运算,确保了测量的速度和准确性。此外,用这种方法建立的标定数据模型还解决了相对平缓表面测量的限制。
To resolve the problem of recovering height in non-contact measurement based on conoscopic holography, a calibration method of relative phase to height is presented based on the analysis of light intensity to height calibration＇s shortage. Under analysis of theories and experiments, mathematic relation between relative phases and measurement distances is defined, and every parameter is optimized by genetic algorithm with global optimization ability. Experiment results show this method can reduce effects of light fluctuation, simplify operation and improve measurement velocity and precision. Moreover, this data calibration model can also resolve measurement limitation of relative gentle surface.
出处
《半导体光电》
EI
CAS
CSCD
北大核心
2008年第4期613-616,共4页
Semiconductor Optoelectronics
关键词
锥光全息
非接触测量
数据标定
遗传算法
conoscopic holography
non-contact measurement
data calibration
genetic algorithm
