摘要
版库装置是一些半导体设备的必要组件,版库装置的主要功能是:对放置于版库上的版盒进行检测,识别版盒中掩模版的存贮状况;锁定或解锁版盒;将指定版槽定位到版交接位置,从而对指定版槽进行放掩模版或取掩模版操作等。版库软件设计开发的目的就是为了实现上述功能。对版库软件的设计开发过程应用软件工程的方法。
Reticle library is a necessary component of specific semiconductor equipments. The main functions of reticle library are: Detecting the presence of reticle box, scaning the presence of reticles in box, locking or unlocking box, moving specific reticle to exchange position, and so on. The reticle library software is designed for these purpose. The software engineering method is applied in the design and development of reticle library.
出处
《电子工业专用设备》
2008年第8期41-47,共7页
Equipment for Electronic Products Manufacturing
关键词
版库装置
软件设计
升降台
掩模版
版盒
锁定
解锁
Retilcle Library(RL)
Software Design
Elevator
Reticle
Reticle Box
Lock
Unlock