摘要
采用非对称双极脉冲磁控溅射制备了一系列不同调制周期的TiN/ZrN纳米多层膜,利用X射线衍射分析(XRD)、纳米压痕仪、扫描电子显微镜(SEM)表征了薄膜的微观结构、力学性能和断口形貌。结果表明,在调制周期为30nm时,纳米硬度达到38GPa。
TiN/ZrN muhilayers with different modulation periods were prepared by asymmetrical bipolar pulsed reactive magnetron sputtering. The microstrueture, mechanical properties and fracture characteristics of multilayers were investi- gated by X-ray diffraction, scanning electron microscopy and nonoindentation. The results show that the nano-hardness reaches to 38 GPa at modulation period 30 nm.
出处
《金属热处理》
CAS
CSCD
北大核心
2008年第8期83-85,共3页
Heat Treatment of Metals
关键词
纳米多层膜
力学性能
调制周期
nano-muhilayers
mechanical property
modulation period
