摘要
介绍了一种新型等离子体增强化学气相沉积内表面复合处理系统。利用此系统沉积TiN涂层的结果表明,100mm×1000mm316不锈钢管内表面沉积涂层相对均匀,且具有较好的表面特性和机械特性。
A new kind of plasma enhanced chemical vacuum deposition （PECVD） system which used to strengthen com- poundly the inner surface of the tube sample was presented. Concretely, TiN coating was prepared on the inner surface of the tube sample（φ100mm× 1000 mm） using the system, and all the results indicate that the coating provides relative uniform thickness and good surface and mechanical properties.
出处
《金属热处理》
CAS
CSCD
北大核心
2008年第8期93-95,共3页
Heat Treatment of Metals
关键词
等离子体增强化学气相沉积
管状样品
内表面
plasma enhanced chemical vacuum deposition （PECVD）
tube sample
inner surface
