摘要
针对高成像质量的离轴光学系统的计算机辅助装调问题,许多研究者提出了利用泽尼克系数建立灵敏度矩阵来求解失调量,但这种方法只有在泽尼克系数和失调量存在线性关系的前提下才能准确求解。提出了一种新的能求解较大失调量的计算机辅助装调方法,用此方法对一个口径为250mm的离轴卡塞格林系统进行了装调,得到了中心视场波像差RMS为0.0405λ(λ=632.8nm)。由这种方法计算出的失调量不仅准确,而且能够用于系统装调初期存在大失调量的情况。因此用这种方法能够显著提高离轴光学系统的装调效率。
The high performance off-axis optical system is generally difficult to align.Many researchers have reported that using sensitivity matrix of some Zernike coefficients is available in alignment.However this method has a weak point in that it generates an accurate result only when the misalignments of component are located within the range where Zernike coefficients are linear to the amount of misalignments.A new method which can solve large misalignments is developed.The application of this method for alignment a diameter 250mm off-axis Cassegrain system produces a measured wavefront error 0.0405λ,atλ= 632.8(?).These results show that this method can calculate large misalignment accurately and has a much better performance than sensitivity matrix method.
出处
《光学技术》
CAS
CSCD
北大核心
2008年第4期514-517,共4页
Optical Technique
关键词
应用光学
计算机辅助装调
灵敏度矩阵
逆向优化
applied optics
computer aided alignment
sensitivity matrix
reverse-optimization