摘要
本文介绍了采用自整定、自适应技术，使炉温得到有效控制的钟罩式高温烧结炉的温度控制方法。
A temperature control technique for high temperature bell sintering furnace is described. With using the technology of self-tuning and self-adapting, the temperature of the furnace is controlled efficiently.
出处
《微细加工技术》
1997年第4期66-69,共4页
Microfabrication Technology
关键词
温度控制
集成电路
封装
制作工艺
high temperature bell sintering furnace
temperature control
self-tuning
self-adapting
