摘要
本文讨论隧道窑中工件的温度响应，结果表明。工件所经历的温度过程相对于隧道窑设定的温度曲线而言，会出现温度滞后。文章介绍了影响温度滞后的若干因素。
The temperature response of processing components in tunnel kiln is discussed. In comparison to the setted temperature curve, the temperature course of components displays lag phenomena on which the effect of several factors is introduced in more detail.
出处
《微细加工技术》
EI
1997年第4期70-76,共7页
Microfabrication Technology
