摘要
本文报道了采用等离子体CVD方法制备Fe^2O^3/TiO^2薄膜材料,并用浸渍法对表面修饰了In,制成了检测鱼鲜度了TMA的薄膜气体传感器,并具有很好的灵敏度、选择性、稳定性和响应、恢复特性。
Fe2O3-TiO2 thin films were prepared by means of plasma enhanced chemical vapour deposition methods and the film surface were modified by means of soaked technique with indium. Thin films gas sensors were fabricated for detecting trimethylamine gases. The sensitivity, selectivity, stability and respose-restoring characteristics of film sensors are all excellent.
出处
《传感技术学报》
CAS
CSCD
1997年第4期38-43,共6页
Chinese Journal of Sensors and Actuators
