摘要
应用射频磁控溅射法在SrTiO3(STO)基片上制备了全钙钛矿结构La0.5Sr0.5CoO3/PbZr0.53Ti0.47O3/La0.5Sr0.5CoO3(LSCO/PZT/LSCO)电容器异质结,并进行了结构和性能的表征.X射线衍射(XRD)的研究表明,LSCO/PZT/LSCO异质结在SrTiO3(STO)基片上为外延生长.对该电容器铁电性能的研究发现,在5 V驱动电压下,电滞回线饱和趋势良好,矫顽场电压为1.8 V和剩余极化强度为21.5×10-6C/cm2,漏电流为8.9×10-8A/cm2.实验还证实该电容器具有良好的脉冲宽度依赖性及抗疲劳特性.
All perovskite La0.5Sr0.5CoO3/PbZr0.53Ti0.47O3/La0.5Sr0.5CoO3 (LSCO/PZT/LSCO) capacitor heterostructure have been fabricated on SrTiO3 (STO)substrate using radio frequency sputtering method, the structural and physical properties of the heterostructure have been investigated. X-ray diffraction analysis (XRD) indicates that LSCO/PZT/LSCO heterostructure is epitaxially grown on SrTiO3 (STO)substrate. Ferroelectric properties are studied, it is found that the hysteresis loop of LSCO/PZT/LSCO capacitor is well saturated at 5 V. The coercive voltage, remnant polarization, and leakage current density are 1.8 V, 21.5 ×10^-6A/cm^2' and 8.9×10^-8A/cm^2, respectively. Moreover, LSCO/PZT/LSCO capacitor possesses good pulse width dependence, and fatigue resistance.
出处
《河北大学学报(自然科学版)》
CAS
北大核心
2008年第4期369-372,共4页
Journal of Hebei University(Natural Science Edition)
基金
973前期研究专项(2007CB616910)
教育部科学技术研究重点项目(207013)
河北省自然科学基金重点项目(E2005000130)
河北省科技攻关项目(04213579)