触点式微型光热驱动器设计及实验研究

Design and research of the point-contact optothermal microactuator

随着微电机系统(MEMS)在众多领域的广泛应用,各种形式的微型驱动器不断得到发展。介绍微尺度光热膨胀与光热微驱动的原理,设计与加工制作了基本型和优化型触点式微型光热驱动器,开展了光热微驱动的实验研究,证明了光热微驱动的可行性,并验证了优化型触点式微型光热驱动器的优化性能。

As the applications of micro electro-mechanical systems（MEMS） become wider in various fields, sorts of microactuators have chances to develop uninterruptedly. The principle of micro optothermal expansion and optothermal rnicroactuator are introduced. We designed and fabricated a basic point-contact optothermal microactuator, and further developed an optimized one. Experiments were carried out to prove the feasibility of optothermal micro- actuation. The characteristic elegances of the optimized point-contact optothermal microactuator were further demonstrated through experiments.