摘要
激光拉曼光谱是一种优异的、灵敏的、应用广泛的无损表征技术,对于评估碳物质(薄膜)质量及其键合状态,也是有效的手段.将它应用于CVD金刚石薄膜的质量表征时,不仅能确定该膜是晶态或非晶态,而且能确认膜内金刚石结构、石墨结构、非晶碳结构的存在,十分灵敏地反映碳的不同键合状态.借助标准线形函数(高斯函数、洛伦兹函数)的拟合分析,可以获得许多反映金刚石膜质量(结晶度、缺陷密度、纯度、内应力等)的有用信息.
Laser Raman spectroscopy is a superior, sensitive and widely-used technique for nondestructive characterization, and is particularly an effective method to evaluate the quality and bonding states of carbon materials. When applied to characterize the quality of CVD diamond films, laser Raman spectroscopy can not only determine whether the film is crystalline or amorphous, but also confirm the existence of diamond, graphte and amorphous carbon structure 'in the film, and sensitively reflect the different bonding states of carbon. By means of line shape fitting analyses using model line shape functions (e. g. the Gaussian, Lorentzian) of Raman spectra, much useful information reflecting the quality of diamond films such as crystallinity, defect density, purity, internal stress etc. can be obtained. The present paper briefly reviews the research results and the present situation in the field.
出处
《理化检验（物理分册）》
CAS
1997年第7期21-25,共5页
Physical Testing and Chemical Analysis(Part A:Physical Testing)
关键词
激光拉曼光谱
CVD
金刚石膜
残余应力
薄膜
Laser Raman spectroscopy
CVD diamond film
Internal stress
Film purity
Crystallinity
