PCVD法工模具表面强化设备的研制

Development of PCVD Equipment for Surface Strengthening of Tools and Dies

介绍了 PCVD 表面强化设备的发展概况及一种新研制开发的工业生产型 PCVD 工模具表面强化设备。用该设备可以制备 TiN 系薄膜和 TiSiN,TiAlN 等多元系薄膜;批量处理各类金属切削刀具和模具,显著提高工模具的使用寿命。

The development of PCVD(Plasma Aided Chemical Vapour Deposition)equipment is reviewed and a new type of equipment for mass production is introduced,by which TiN,TiSiN and TiAIN films can be made,and vari- ous cutting tools and dies can be treated in batches.The service life of tools and dies can be markedly prolonged.