摘要
叙述了一种经济实用的被检件在非真空收集器中的质谱检漏方法，通过试验验证了方法的正确性，并从理论上分析了漏率的标定方法、检漏灵敏度以及检测误差。
An economical and practical leak detecting method of mass spectrometry with a part checked in non vacuum container is described.Experiments showed this method is correct.The sensitivity,detecting error and the calibrated leak rate were analysed theoretically.
出处
《中国空间科学技术》
EI
CSCD
北大核心
1997年第5期41-45,70,共6页
Chinese Space Science and Technology
关键词
容器
非真空检漏
质谱分析
密封系统
Container Non vacuum Leak detecting Mass spectrometry Calibration
