利用一次正、二次逆压电效应设计可作动传感器研究

Investigation of generating actuation sensor applying the first direct and the secondary converse piezoelectric effect

进行了一次正压电效应、二次逆压电效应的理论分析与实验验证.理论与实验均证明,压电体通过一次正压电效应产生的电位移,及通过二次逆压电效应产生的应变与应力均与施加外力具有良好的线性关系.由于一次正、二次逆压电效应是在同一压电体内存在的双向效应,其原理特别适合于传感器、执行器集成一体化的研究.因此,利用压电体的一次正压电效应可以测量外力,作为传感器使用;同时利用该压电体的二次逆压电效应可以输出一个微位移,作为执行器使用.提出了利用该原理设计"可作动传感器"的实现方案,并证明了其可行性.

The theory of the first direct piezoelectric effect and the secondary converse piezoelectric effect is analyzed and confirmed by experiments. There is good linear relationship between electric displacement generated by the first piezoelectric effect and strain and stress generated by the secondary converse piezoelectric effect and outside force. Because the first direct piezoelectric and the secondary converse piezoelectric effect are bilateral effect existing in the single crystal, it is especially suitable for the investigation of the integration of sensor and actuator. The proposal and realization of the structure of the generating actuation sensor are put forward through the principle that regards the first direct piezoelectric effect of crystal as sensor because of its measuring force and the secondary converse piezoelectric effect as actuator because of its output micro-displacement , and the feasibility is proved through the experiments.