混成式热释电非制冷红外焦平面探测器研究

Hybrid pyroelectric uncooled infrared focal plane array

热释电非制冷红外焦平面探测器在军民领域具有广阔的应用前景。为了实现探测器的国内工程化研制,采用混成式技术,成功研制了基于锆钛酸铅(PZT)铁电陶瓷材料,像元尺寸为35μm×35μm,列阵规模为320×240元的非制冷红外焦平面探测器。通过自主设计,研发的非制冷焦平面测试平台,得到了此器件的基本性能参数平均电压响应率1.1×105V/W,平均探测率5.6×107cm·Hz1/2·W-1,并实现了该探测器热成像。结合实际的研究工作,较为系统地介绍和讨论了热释电非制冷红外焦平面研制过程中各项关键技术。在器件光电响应测试数据分析的基础上,进一步提出下一阶段研究工作的重点和器件性能优化的方向。

Pyroelectric uncooled infrared focal plane array （UFPA） technology has great potential for appliancation in various military and civilian applications. In order that the technology could be implemented in domestic manufacture,the research based on hybrid device technology was developed in the UFPA fabrication. In the research,a 320×240 format pyroelectric UFPA with 35μm pixel pitch was present based on lead zirconate titanate （PZT） ferroelectric ceramic. The results show that the mean voltage responsivity of the UFPA is 1.1×10^5 V/W,and the mean detectivity is 5.6×10^7 cm·Hz^1/2·W-^1. An infrared thermal image was obtained by theUFPA. Combined with practice the key technologies for the hybrid pyroelectric UFPA were introduced and discussed systematically,including the preparation technology of high performance ferroelectric ceramic,the technology for decreasing the thickness of ferroelectric ceramic,element reticulation technology,indium solder bump bonding technology and readout integrated circuit technology,etc. In the end the new emphases of the research in the future and the way how to optimize the device′s performance are pointed out base on the analysis data of photoelectric test.