MEMS微惯性测量组合标定技术研究

Research on Calibration Techniques for MEMSMicro Inertial Measurement Unit

在介绍MEMS微惯性测量组合组成结构的基础上,根据MEMS陀螺和MEMS加速度计的输出模型,提出并推导了一种MEMS微惯性测量组合标定方法。利用该方法标定微陀螺的基本思路是:设置转台以速率方式运行,并且确定合适的旋转角速率间隔,使微惯性测量组合每个轴向的陀螺仪分别敏感不同的角速率,然后通过一系列计算,求解出待标定的零点偏置电压、刻度因子、交叉耦合系数及其对应的安装误差角。标定加速度计的方法类似,不同之处是设置转台以位置方式运行。理论分析和实验结果表明,利用本文所介绍的这种标定方法能够准确地将MEMS微惯性测量组合的输出电压值转化为对应的角速度和比力信息,为后续精确的姿态解算和导航计算奠定基础。

Based on the introduction of the composing structure of MEMS-MIMU （micro inertial measure- ment units）, according to the output model of MEMS gyro and MEMS accelerometer, a new calibrating method for MEMS-MIMU is proposed and deduced. The basic thought of calibrating MEMS gyro in this method is to set the swivel table running in the speeding mode, and to choose the appropriate interval the angle speed, and to make the individual MEMS gyro sense the different angle speed, and then to compute the zero-bias voltage, the scale factors, the across couple coefficients, and the corresponding fixing angle error by a series of computation. The method of calibrating MEMS accelerometer is similar to the method for MEMS gyro, the different is to set the rotating table running in the position mode. The theory analysis and experiment results show the new method can well and truly transform the outputting voltages of MEMS-MIMU into the corrsponding angle rates and the ratio information, so that to establish the base for the following attitude resolve and the navigation computation.