大角度交叉波导通用模型及其验证

A universal model for wide-angle crossed waveguides and the experimental verification

利用菲涅尔衍射原理,详细分析了光波在大角度交叉区域的传输特性,建立了任意角度交叉波导衍射效应的通用分析模型,得到在一定光波导结构条件下衍射损耗、端面反射及串音与交叉角度之间的关系。在此基础上通过BeamPROP光学软件仿真验证,结果表明,基于衍射原理建立的交叉波导通用分析模型在分析大角度交叉结构时有比较高的计算精度,计算误差小于0.2%。在此基础上,在硅衬底上利用低压化学气相淀积技术制作了二氧化硅交叉波导结构,进一步验证了上述理论分析结果。

The characteristic of the light propagating across the wide-angle crossing region is analyzed using the Fresnel diffraction theory. A universal model is set up, which can analyze the diffraction effect in the crossing region formed by two crossed waveguides. The universal model can give out relation expressions for the diffraction loss, facet reflection and crosstalk versus the intersection angle under certain optical waveguide parameters. The BeamPROP optical software verifies the universal model. The comparison results show that the calculation error of the diffraction model is less than 0.2% for the large intersecting angle. Finally the crossed silica waveguides are fabricated on silicon substrate by low pressure chemical vapor deposition method. The theoretical results are further verified by the experiments.