大气压离子质谱仪及高纯氮中二氧化碳的质谱分析

Atmospheric Pressure Ionization Mass Spectrometer and Its Applications in Analysis of High Purity Nitrogen

本文介绍大气压离子质谱仪，用该法测定了高纯氨中的二氧化碳。叙述了共存水对二氧化碳测定的干扰及其用五氧化二磷的脱除方法。同时讨论了气体压力与二氧化碳含量的关系等。方法的测量精度优于10％。

In this paper, an Atmospheric Pressure Ionization Mass Spectrometer (API-MS) ispresented' API-MS method is studied for the determination of residual CO2 in high purity nitrogen. The interference of coexistent water with the CO2 and the method for removing the water by P2O5 trap are described. The influences of gas pressure on the CO2,concentration are discussed. The method precision is better than 10%.