微型机电系统在物化分析中的应用

The Application of MEMS in Physical and Chemical Analysis

介绍了微型机电系统（ＭＥＭＳ）的基本概念，发展简史和主要特点。详细讨论了ＭＥＭＳ在化学分析中的应用，指出ＭＥＭＳ技术使化学分析仪器微小型化、性能提高，同时还降低了仪器和实验的成本。最后简要介绍了微小型化学分析仪器的支撑技术。

s A comprehensive review about the application of Microelectronics Machine System (MEMS) in physical and chemical analysis is given,including MEMS's basic concept,briefhistory and main features.It is indicated that the application of MEMS in physical and chemical analysis gives rise to miniaturization of the instruments,improves their properties and,at same time,reduces the cost of instruments and experiments.Finally,the support technologies of micro analysis instruments are simply introduced.