扫描核探针技术与应用进展

Development in Scanning Proton Microprobe Technique and Applications

扫描核探针技术作为一种新的微区痕量元素分析及元素微区分布分析手段越来越引人注目。作者从整机装置、多种离子束分析方法和元素图象技术等方面简介近年来的一些进展及在地学、生命科学、材料科学与冶金、环境科学、微电子学、文物与考古等方面的应用。

As a new tool for trace-element analysis and elemental spatial distribution analysis in microarea, scanning proton microprobe (SPM) is becoming more noticeable. This paper provides a review on the progress of SPM facilities, analytical techniques, imaging tech- niques and its applications to geology, life science, material and metallurgical sciences. en- vironmental science, arts and archaeology and microelectronics.