摘要
概述了模糊判别法用于提高金丝键合拉力强度的工艺优化状况。主要对金丝键合前应采取何种等离子清洗工艺给出了一个较为量化的评价结果,其演算的结果代表了各种清洗情形下的好坏趋势,对提高金丝键合拉力强度起到工艺优化的指导作用。
This paper summarizes the application of the fuzzy evalution on gold wire-bonding process optimization.An evalution of relative quantization are presented about appling various the plasma cleaning process before wire-bonding,and it＇s operation result reflect the good or bad trend of the various plasma process.The result is a guide to optimize the wire-bonding process foe improving the bonding strength.
出处
《电焊机》
2008年第9期50-53,共4页
Electric Welding Machine
关键词
模糊
键合
等离子
评价
fuzzy
bonding
plasma
evalution
